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In situ transformation and cleaning of tin-drop contamination on mirrors for extreme ultraviolet light

机译:原位转换和清洗镜子上的锡滴污染   用于极紫外线

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摘要

Tin-drop contamination was cleaned from multilayer-coated mirrors byinduction of phase transformation. The {\beta} - {\alpha} phase transition oftin was induced to initiate material embrittlement and enable facile removal ofthick tin deposits. The necessary steps were performed under high-vacuumconditions for an in-situ demonstration of the removal of severe tincontamination from optics used for reflection of extreme ultraviolet light.Molten tin of high purity was dripped onto mirror samples, inoculated withsmall seed particles of gray tin and then cooled to temperatures in the rangeof -25 {\deg}C to -40 {\deg}C. As recorded by photographic imaging, the dropswere converted in an evacuated chamber to gray tin by induction of tin pestleading to their disintegration within a few hours. They could then be easilycleaned or fell off from the surface without causing any damage of themultilayer coating. Cleaning of tin contamination from the mirrors with almostcomplete structural transformation of the tin drops and subsequent removal bypuffs of dry gas could be achieved within a day. The fraction of area coverageof untransformed tin remaining on the samples after cleaning was evaluated fromthe images and generally found to be well below 1%. After tin dripping, phasetransition and cleaning, analysis of the reflectance of a Mo/Si-coated mirrorwith measurements at wavelengths of 13.6 nm and 13.5 nm showed a reduction byonly 0.5%, with an upper limit of 1%.
机译:通过诱导相变,从多层镀膜镜中清除了锡滴污染。诱导锡的{\ beta}-{\ alpha}相变以引发材料脆化并使得能够容易地去除厚锡沉积物。在高真空条件下进行了必要的步骤,以现场演示从用于反射极紫外光的光学器件中去除严重锡污染的过程。将高纯度的熔融锡滴到镜面样品上,并接种小颗粒的灰锡和然后冷却至-25℃至-40℃的温度。如通过照相成像所记录的,通过诱导锡害虫导致在数小时内崩解,液滴在真空室内被转化为灰锡。然后可以很容易地将它们清洗或从表面掉下,而不会造成多层涂层的任何损坏。一天之内就可以完成从锡镜上清除锡污染的工作,锡滴的结构几乎可以完全转变,然后通过吹干气体去除。根据图像评估清洁后残留在样品上的未转化锡的面积覆盖率,通常发现其远低于1%。滴锡,相变和清洁后,对Mo / Si镀膜反射镜的反射率进行分析,并在13.6 nm和13.5 nm波长处进行测量,结果表明反射率仅降低了0.5%,上限为1%。

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